| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a large-stroke accurate stage from interfering in an optical system whose working distance is short even when the stage is moved in the case of incorporating the optical system in the stage. SOLUTION: This transmission illuminating optical system device is equipped with an illuminating optical system 6 radiating illuminating light to an object to be observed 4, an image-formation optical system 5 forming the image of the object 4 on a desired surface, the stage 2 capable of two-dimensionally moving in a state where the object 4 is placed between the optical systems 6 and 5, an optical system retreat means 10 moving the optical system 6 or 5 to a position where the optical system 6 or 5 does not come in contact with the stage 2 at the time of driving the stage 2 in accordance with the movement of the stage 2, and a control part 13. Thus, the movement control of the stage 2 is performed and the movement control of the means 10 is performed in accordance with the movement control of the stage 2.</p> |
