| 发明名称 |
A measurement system |
| 摘要 |
<p>A measurement system (1) has a camera with a lens (12) and a separate sensor (10) mounted so that their planes (13,11) intersect at an object plane (3) according to the Scheimpflug principle. A reference camera (4) is normal and provides a 2D normal image which is used by an image processor (25) to determine a calibration image. This allows the image processor to determine height of the object (2). A single image capture provides an image of the full object, such as a ball grid array (BGA) <IMAGE></p> |
| 申请公布号 |
EP1014438(A2) |
申请公布日期 |
2000.06.28 |
| 申请号 |
EP19990650120 |
申请日期 |
1999.12.22 |
| 申请人 |
MV RESEARCH LIMITED |
发明人 |
MAHON, JAMES;BOYLE, ADRIAN;DORR, NIALL;CONLON, PETER |
| 分类号 |
G01N21/956;H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
G01N21/956 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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