| 发明名称 |
Silicon carbide chrome thin-film resistor |
| 摘要 |
A thin-film resistor is formed from silicon, carbon, and chromium. The resistivity of the thin-film resistor, and therefore the resistance and temperature coefficient of resistance (TCR) of the resistor, are tailored to have specific values by varying the elemental composition of the silicon, carbon, and chromium used to form the resistor.
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| 申请公布号 |
US6081014(A) |
申请公布日期 |
2000.06.27 |
| 申请号 |
US19980188782 |
申请日期 |
1998.11.06 |
| 申请人 |
NATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
REDFORD, MARK;BOYLE, RIKKI;ALIYU, YAKUB;MCGREGOR, CHIC;GREGORY, HAYDN |
| 分类号 |
H01L21/31;H01C7/00;H01C7/06;H01L21/02;(IPC1-7):H01L29/72 |
主分类号 |
H01L21/31 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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