| 摘要 |
An X-ray illumination system includes first and second X-ray mirrors for reflecting a synchrotron radiation beam, sequentially, a driving system for changing at least one of position and attitude of each of the first and second X-ray mirrors, a first measuring system for detecting a synchrotron radiation beam impinging on the first X-ray mirror, a second measuring system for measuring at least one of position and attitude of the first X-ray mirror with respect to a predetermined reference, or at least one of relative position and relative attitude between the first and second X-ray mirrors, a first control system for controlling drive of the first X-ray mirror on the basis of the measurement by the first measuring system, and a second control system for controlling drive of the second X-ray mirror on the basis of the measurement by the second measuring system.
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