发明名称 DOOR OPEN CYLINDER OF ION INJECTING APPARATUS
摘要 PURPOSE: A door open cylinder of an ion injecting apparatus is provided to minimize an impact forced to a welded portion of a frame and a cylinder. CONSTITUTION: An ion injecting apparatus comprises a cylinder(40), a frame(42), a pad(44),and a screw(46) for fixing the pad(44). The frame(42) is connected to a portion of the cylinder which is opposed to a portion of the cylinder(40) connected to a frequenting door. The cylinder(40) is welded to the frame(42), and the pad(44) supports the frame(44) at a lower part of the frame(44). A part of the pad(44) is extended to a side plane of the frame(42). The extended part of the pad(44) is fixed at the frame(42) by the screw(46). The frame(42) is connected to a bottom through the pad(44).
申请公布号 KR20000034532(A) 申请公布日期 2000.06.26
申请号 KR19980051871 申请日期 1998.11.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LIM, CHANG GEUN
分类号 H01L21/265;(IPC1-7):H01L21/265 主分类号 H01L21/265
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