SURFACE EXAMINING APPARATUS, EXAMINING METHOD, AND PREPARATION METHOD OF LIQUID CRYSTAL DISPLAYER USING THE APPARATUS OR THE METHOD

摘要

PURPOSE: A surface examining apparatus, a surface examining method, and a preparation method of liquid crystal displayer using the apparatus or the method are provided. The apparatus is more compact and cheaper than existing one. CONSTITUTION: A surface examining apparatus is provided with the first light beam irradiating system which irradiates the first light beam to the surface to be examined to form the first band-shaped examination region along the first direction on the surface to be examined; the first light receiving system which receives the scattered light from the first band-shaped examination region; the second light beam irradiating system which irradiates the second light beam to the surface to be examined to form the second band-shaped examination region along the first direction; the second light receiving system which receives the scattered light from the second band-shaped examination region; and a scanner which moves the first and second light radiating systems and the surface to be examined relatively along the second direction which is nearly perpendicular to the first direction, wherein the first band-shaped radiation region and the second band-shaped radiation region are formed on the surface to be examined with spaced along the second direction.