ABRASIVE COMPOSITION FOR THE ELECTRONICS INDUSTRY

摘要

PURPOSE: Abrasive composition for the integrated circuits electronics industry has value of wide range as concentration of surfactant, and excellent surface of oxidized silicon layer. CONSTITUTION: Abrasive composition for the integrated circuits electronics industry comprises an aqueous acid suspension of individualized colloidal silica particles not linked to each other by siloxane bonds and an abrasive surfactant.