METHOD FOR EXAMINING DEFECT IN SHAPE

摘要

PURPOSE: An examination method of the defect in a shape is provided to detect the defect in a shape of an object in a short time even by a non-skillful operator. CONSTITUTION: A reference image(22) expressed in gray scale is set and registered as an image about a reference model(21) that is a reference of defective shape examination. The brightness of the respective pixel of an examined image(24) of an examined object(23) is compared to the brightness of the respective corresponding pixel of the reference image to examine the existence of defect in the shape. If the brightness of the respective pixel of an examined image is within an allowable brightness of the respective corresponding pixel appointed by a minimum image and a maximal image as the reference image of the reference model, the shape of the examined object is decided to be normal. If not, the shape of the examined object is decided to be defective.