DEVICE AND METHOD FOR INSPECTING SHORT CIRCUIT IN PRINTED WIRING BOARD

摘要

PROBLEM TO BE SOLVED: To reduce the number of inspections substantially in comparison with a method to measure short circuits between every combination of circuit patterns by a contact probe without using master data in inspections of short circuits in printed wiring boards. SOLUTION: A driving means 50 is controlled by a means 104 for controlling the measurement of area related values to bring a contact probe into contact with every circuit pattern of a substrate to be inspected. Then area related values are measured by an area related value measuring means 60, and the measured values related to the area of every circuit pattern are compared with each other by a short circuit candidate extracting means 105 to extract a group of circuit patterns with differences within a predetermined range. The driving means 50 is controlled by the short circuit measurement control means 106 to bring the contact probe into contact with each circuit pattern constituting a combination of circuit patterns among the extracted group of circuit patterns, and continuity is measured by a continuity measuring means 70.