COMB STRUCTURE, ACTUATOR AND INERTIA SENSOR

摘要

PROBLEM TO BE SOLVED: To make a magnetic force generated between two combs constant to a relative motion of the combs. SOLUTION: The comb structure has a pair of combs 21 and 22, a circuit 23 for magnetically coupling the combs 21 and 22, a coil 24 wound to an optional position of the circuit and a power source 25 coupled to the coil. The combs meshed via a gap S are coupled by the circuit 23. The combs are driven by a magnetomotive force generated at the coil 24. A force acting to between the combs is stronger by several hundreds times than a force of an electrostatic force comb structure and acts constantly with respect to a move distance of the combs, thus facilitating controlling a position and a force. Since the force is large, the structure can be driven with an optional frequency not at a resonance point. Moreover, since the structure can be manufactured in an equal process to an HDD(hard disk drive) head, the actuator and the head can be manufactured easily integrally.