| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular ion enhanced ion source device capable of producing high current ions. SOLUTION: The ion source device has a pair of mirror electromagnets 11, 12 arranged at regular intervals on the outside of a plasma chamber 10, and a multipole permanent magnet device 20 arranged between a pair of mirror electromagnets, on the outside of the plasma chamber 10. A confinement magnetic field is formed within the chamber with a pair of mirror electromagnets and the multipole permanent magnet device, and gas for producing ions and 2.45 (GHz) microwave are introduced into the magnetic field to produce ion beams in the center axis direction of the chamber. |
