| 摘要 |
PROBLEM TO BE SOLVED: To provide an exhaust device with high reliability, capable of preventing breakage of an exhaust pipe installed in a panel. SOLUTION: A cooling pipe 15 comprising a supply pipe 15a and a recovering pipe 15b for supplying and recovering cooling water is connected to an exhaust heat 4 to which an exhaust pipe 6 of a panel 7 is connected, and an exhaust pipe 14 whose one end is connected to a vacuum exhaust line is also connected. The exhaust pipe 14, the supply pipe 15, and the recovering pipe 15b each constituted with an elastic metal flexible pipe are very closely arranged and their surroundings are covered with a heat insulating material 16, and the exhaust pipe 14, the supply pipe 15a, and the recovering pipe 15b are installed in a zigzag line. A spring 17 made of a heat insulating material is installed so as to support the exhaust pipe 14, the supply pipe 15a, and the recovering pipe 15b.
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