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发明名称
An ion implanter with post mass selection deceleration
摘要
申请公布号
GB2307095(B)
申请公布日期
2000.06.21
申请号
GB19960016169
申请日期
1996.08.01
申请人
* APPLIED MATERIALS INC;* APPLIED MATERIALS INC;* APPLIED MATERIALS INC;* INTEL CORPORATION;* APPLIED MATERIALS INC
发明人
JONATHAN GERALD * ENGLAND;BABAK * ADIBI;MITCHELL C * TAYLOR
分类号
H01J37/30;H01J37/317;(IPC1-7):H01J37/317;H01J37/12
主分类号
H01J37/30
代理机构
代理人
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