| 摘要 |
PROBLEM TO BE SOLVED: To provide a production process for quartz glass having higher degrees of freedom with respect to the product shape and a lower degree of contamination. SOLUTION: This production process comprise introducing a gas for plasma formation into an electric insulator tube 1 from a plasma formation gas source 11, forming a plasma space 15 containing an inductive coupling type thermal plasma obtained by applying a high frequency electric field that is caused with a high frequency induction coil to the introduced plasma formation gas, supplying powdery quartz to the plasma space 15 through a powder introduction port 5 to heat and melt the powdery quartz by the inductive coupling type thermal plasma, and allowing the resulting molten quartz particles 13 to collide with a rotatable and movable table 9 placed below the plasma space 15, to obtain a quartz glass deposit. |
