| 摘要 |
PROBLEM TO BE SOLVED: To stably produce ultrapure water satisfying desired required quality over a long period of time by providing a trihalomethane removing device removing the greater part of trihalomethane in water to be treated at the arbitrary position of a pretreatment device and a primary pure water making device in an ultrapure water making apparatus. SOLUTION: An ultrapure water making apparatus is constituted of a pretreatment device, a primary pure water making device and a secondary pure water making device, and a trihalomethane removing device is arranged at the arbitrary position of the pretreatment device and the primary pure water making device to remove the greater part of trihalomethane to produce ultrapure water of high water quality. As the trihalomethane removing device, for example, a volatilizing tower subjecting trihalomethane to volatilizing treatment to remove the same is used. That is, the volatilizing tower is constituted of a sprinkling pipe 1 for sprinkling water into the tower from above to from a water membrane and an equipment 3 blowing air into the tower from below, and trihalomethane in water is removed by forming the water membrane to be expelled into the atmosphere by the force of air or inert gas. |
