Laser apparatus, pulsed laser oscillation method and projection exposure apparatus using the same

摘要

A laser apparatus includes a laser resonator having a first reflective surface and a second reflective surface, the laser resonator further including a laser medium disposed between the first reflective surface and the second reflective surface for processing light reflected from the first and second reflective surfaces to output a laser beam to be resonated, and a resonator loss varying unit disposed between the first reflective surface and the second reflective surface of the laser resonator, the resonator loss varying unit being capable of switching a state thereof between a first state having a resonance frequency substantially coinciding with one of frequencies at which laser oscillation of the laser resonator is possible and a second state having the resonance frequency shifted to the value that is substantially different from any one of the frequencies at which laser oscillation of the laser resonator is possible to vary a loss of the laser resonator.