FLOOR STRUCTURE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a floor structure for semiconductor manufacturing equipment which can provide at low cost a low-vibration environment for installation of precision manufacturing machine or precision measuring instrument and accommodates easily to change of installation places for such machine or instrument. SOLUTION: For a flooring material for work-executing area, a grating 2 is arranged, and board materials each made up by interposing a vibration- controlling material 20 between board members 18 and 18 each rigid and in a large mass to form a flooring material for equipment-installing area for installing vibration-detesting equipment 4 such as precision manufacturing machine or precision measuring instrument thereon are mounted on and fixed to the same support frame.