| 摘要 |
PROBLEM TO BE SOLVED: To accomplish a small and simple valve structure for puffer piston furnished with high reliability including less movable parts while a sufficienct shutoff performance is secured. SOLUTION: A puffer piston 10 includes a disc-shaped compression board 21, which is provided with a plurality of holes 22 for taking a room temperature gas into a puffer chamber 11 at the time of closing the electrodes. On the side with puffer chamber 11, the compression board 21 is equipped coaxially with a disc-shaped valve plate 31 so as to block the holes 22, and the plate 31 is made from a flexible, highly resilient metal plate of phosphor bronze, stainless steel, etc. The valve plate 31 is furnished with valves 32 to block the holes in the parts overlapping with the holes 22 in the board 21. Each valve 32 is prepared by forming an approx. channel-form cut 33 from the valve plate body, which is fixed directly to the compression board 21 using bolts 34.
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