ELECTRICAL PROPERTY MEASURING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To enable an electrical property measuring device and method to make a stable measurement of electrical properties at a high speed in an inert gas atmosphere by a method wherein an inert gas exhaust nozzle is provided so as to turn an empty space around a contact point between the measurement terminal of a semiconductor device and a probe into an inert gas atmosphere. SOLUTION: An electrical property measuring device 10 takes a measurement through a manner where a semiconductor device 19 is placed on the surface of a measurement pad 11, a probe 13 is brought into contact with the measurement terminal of the semiconductor device 19, the end 13b of the probe 13 opposite to its contact end 13a is fixed to a probe fixing member 15 which is provided to the upside of the measurement pad 11. The probe fixing member 15 is supported by a support member 17, and an inert gas exhaust opening 21 is fixed to the support member 17 through the intermediary of a fixing piece 21c. A gas flow path, through which inner gas fed from the gas exhaust nozzle 21b is sent to an empty space around a contact point between the measurement terminal and the probe 13 is formed between the gas exhaust nozzle 21b and the contact point.