发明名称 CHAMBER, AIR PRESSURE CONTROL DEVICE AND METHOD, AND MEASURING INSTRUMENT
摘要 PROBLEM TO BE SOLVED: To provide an air pressure control method with which a stabilized environmental condition can be obtained, and to provide a measuring unit with which air pressure can be measured with high precision at low price. SOLUTION: This pressure control device is provided with an outside air pressure detecting means 18 which detects the outside air pressure, a control mode setting means 16 which sets the second control mode with which the above-mentioned inside air pressure is controlled, based on the result of detection of the outside air pressure detecting means 18, and a control part 15 which controls inside air pressure, based on the first control mode or the second control mode set by the control mode setting means 16.
申请公布号 JP2000164477(A) 申请公布日期 2000.06.16
申请号 JP19980334758 申请日期 1998.11.25
申请人 NIKON CORP 发明人 SATO YUTAKA
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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