| 摘要 |
PROBLEM TO BE SOLVED: To prevent the leakage of fluorescent X-ray regardless of the size of a sample to ensure high safety in a lower surface irradiation method. SOLUTION: A cover case 10 formed of a side circumferential wall member 11 and an attachable and detachable lid member 16 is provided above a base plate 2 on the upper surface of a chamber 1 in such a manner as to be vertically movable. In the analysis of a small sample, the sample is placed on the base plate 2, the cover case 10 having the lid member 16 mounted thereon is lowered, and the analysis is performed while airtightly keeping the inner parts of the cover case 10 and the chamber 1. In the analysis of a large sample, the cover case 10 from which the lid member 16 is removed is lowered, and the analysis is performed in the state where the sample upper part is protruded from the upper end surface of the cover case 10. Even if the fluorescent X-ray emitted from the lower surface of the sample advances horizontally between the sample lower surface and the base plate 2, it is shielded by the side circumferential wall member 11 and not leaked to the outside, and the safety can be thus ensured.
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