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发明名称
Gas heater for processing gases
摘要
申请公布号
HK1014206(A1)
申请公布日期
2000.06.16
申请号
HK19980114622
申请日期
1998.12.22
申请人
SILICON VALLEY GROUP, THERMAIL SYSTEMS LLC
发明人
CRAIG C. COLLINS;ERICA A. AHLSTROM
分类号
B01J19/00;F24H3/04;H01L21/205;(IPC1-7):F24H
主分类号
B01J19/00
代理机构
代理人
主权项
地址
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