| 摘要 |
PURPOSE: A thin film actuated mirror array is provided to prevent gate signal delay by reducing the resistance of gate lines. CONSTITUTION: A thin film actuated mirror array comprises an active matrix(100), support elements(175), an actuator(210) and a mirror(260). The support elements(175) comprise support lines(174), a support layer(170) and first and second anchors(171; 172a,172b). The support lines(174) and the support layer(170) are horizontally formed on an etching resistance layer(155) via first air gap(165). The support lines(174) support common lines(240). The actuator(210) comprises a lower electrode(180), first and second deformation layers(190,191) and first and second upper electrodes(200,201), The lower electrode(180) is U shape and separated from the lines(174). The mirror(260) is supported by a hard mask(330) and a post(250).
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