| 摘要 |
<p>PROBLEM TO BE SOLVED: To carry in/out a sample directly to/from a clean room without causing pollution of the inside environment of the clean room and enable the arrangement to the inside of the clean room or the arrangement for communicating with the inside of the clean room. SOLUTION: In a sample polishing device provided with a polishing room 2 for polishing the sample W and a cleaning room 3 for cleaning the polished sample W on the other side of a load room 1 adjacent to a clean room 4 through oneside partition wall 10, in the load room 1, an air supply device 8a for supplying the clean air to its inside and an exhaust device 9a for forcedly exhausting the inside air are arranged additionally. In the polishing room 2, an air supply device 8b for supplying the clean air to its inside and an exhaust device 9b for forcedly exhausting the inside air are arranged additionally alike, and further, in the clean room 3, an air supply device 8c for supplying the clean air to its inside and an exhaust device 9c for forcedly exhausting the inside air are arranged additionally.</p> |
