Servo accelerometer

摘要

PCT No. PCT/RU94/00138 Sec. 371 Date Jan. 24, 1997 Sec. 102(e) Date Jan. 24, 1997 PCT Filed Jul. 27, 1994 PCT Pub. No. WO96/10185 PCT Pub. Date Apr. 4, 1996The present invention is a compensation accelerometer comprising a separable housing, a sensitive element mounted in the housing on an elastic suspension element, an angle sensor, a servo amplifier and a momentum sensor. In the proposed accelerometer, the blade of the sensitive element, the elastic suspension element and the frame for securing the sensitive element in the housing (support frame) are all made from a single block of monocrystalline silicon. In addition, the two halves of the separable housing, between which is situated the support frame for the sensitive element, each take the form of a block and a cup-shaped magnetic circuit for the momentum sensor. The block is formed from silicon monocrystal of the same orientation as the sensitive element block. The coils of the momentum sensor are secured on the blade of the sensitive element via intermediate plates formed from a silicon monocrystal of the same orientation as the sensitive element block. In the proposed accelerometer, the angle sensor comprises two differentially connected toroidal coils each of which is mounted on the central shaft of its own momentum sensor magnetic circuit. The angle sensor also has a high-frequency alternating signal generator which is connected to the input of the servo amplifier's power amplifier and to the control input of the demodulator which is part of the servo amplifier. According to the invention, the magnetic circuit of the momentum sensor in each half of the accelerometer's separable housing is connected to the silicon block by a connector element, namely, a thermal compensator whose component materials are selected during adjustment of the accelerometer to improve the latter's precision characteristics.