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发明名称
摘要
申请公布号	JP3052158(B2)	申请公布日期	2000.06.12
申请号	JP19910222153	申请日期	1991.08.07
申请人		发明人
分类号	C01B33/02;H01L21/208;H01L31/04;(IPC1-7):C01B33/02	主分类号	C01B33/02
代理机构		代理人
主权项
地址

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