METHOD FOR CHECKING A SURFACE TO BE ANALYSED AND SCANNING SURFACE-ANALYSER

摘要

The present invention pertains to the construction of optical instruments and relates to a method for checking a surface to be analysed as well as to a scanning analyser for detecting defects on a surface. The method involves rotating an object comprising a surface to be analysed about a first rotation axis, generating a light spot on the surface to be analysed, separately receiving the light reflected by a mirror and scattered by the surface to be analysed at the incidence point thereon of said light spot, analysing the signals thus obtained and detecting surface defects. This method can be implemented using an analyser that displaces the light spot relative to the rotating surface to be analysed along an arc and about a second rotation axis which is located outside the limits of the surface to be analysed. The device further determines the occurrence of defects on the surfaces of plates by measuring the value of the scattered light. This invention can be used for checking semiconductor plates and, due to the reduced dimensions and lower cost of the measuring apparatus, enables the integration of said apparatus in industrial equipment used in the electronic industry.