Process for the manufacture of a micromechanical element,申请号EP19960103115-传众专利搜索

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发明名称	Process for the manufacture of a micromechanical element
摘要
申请公布号	EP0732635(B1)	申请公布日期	2000.06.07
申请号	EP19960103115	申请日期	1996.03.01
申请人	C.S.E.M. CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA	发明人	HAENNI, WERNER;PERRET, ANDRE
分类号	G04D3/00;H01H1/00;(IPC1-7):G04D3/00;B23P15/00	主分类号	G04D3/00
代理机构		代理人
主权项
地址

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