摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vessel which does not generate particles in a semiconductor treating chemical, even when storing or transporting a semiconductor treating chemical, and a preparation process thereof. SOLUTION: In a molded vessel, at least the inner side of the vessel is prepared by blow molding an alicyclic structure-containing polymer resin material. When the vessel is filled with at least one aqueous solution chosen from the group consisting of an acidic aqueous solution having a pH of 3 or below, an alkaline aqueous solution having a pH of 10 or above and oxygenated water, and is left still for 24 hours at 23 deg.C, the amount of generated particles of 0.2μm or larger is 0.5 counts/ml or less per 1 cm2 inner surface area of the part of the vessel contacting the aqueous solution.</p> |