| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a ferroelectric cold cathode device which is capable of improving electron emission efficiency by constituting the device of a first electrode structure, a second electrode structure formed on the second main surface of a ferroelectric substrate and a hard carbon film, etc., formed on the first main surface of the ferroelectric substrate so as to cover the first electrode structure. SOLUTION: Pt electrode patterns 22a to 22e constituting the corresponding comb-shaped electrodes are respectively formed on conductive oxide electrode patterns 24a to 24e. The rear surface of the substrate 21 is covered with a conductive oxide 25, such as SrRuO3, and a Pt electrode film 13 is uniformly formed on the conductive oxide 25. Further, a diamond film 26 is formed atop the substrate 21 so as to cover the Pt electrode patterns 22a to 22e. According to such constitution, the first main surface of the ferroelectric substrate 21 acting as an electron emission surface is covered with a hard carbon film, such as a diamond film 26, and, therefore, the electron release efficiency may by exceedingly improved via the first main surface.</p> |
