发明名称 |
INTERATOMIC FORCE MICROSCOPE PROBER AND INTERATOMIC FORCE MICROSCOPE |
摘要 |
PROBLEM TO BE SOLVED: To accurately position a probe sonde on a sample and to provide a prober usable for working and handling a sample by providing a driving device moving a sonde movable independently of a probe on a sample base surface or in the vertical direction to the sample base surface. SOLUTION: A displacement detector 8 arranged above a probe 6 is provided with an optical system 11 applying light to the probe 6 and an optical position detector 12 detecting a position of reflected light from the probe 6. A prober main body 14 of a prober 13 supports a single probe or a plurality of probes 16 via a vertically driving mechanism 15. The tip lower face of the probe 16 constitutes a prober sonde 17. The position of the prober main body 14 is controlled independently on a sample base 4 by the movement of a self-propelled device such as an inchworm or by inertia drive using a driving device for a scanner 3 in an interatomic force microscope 1 for accurately positioning the sharply pointed prober sonde 17 in an area on the order of micrometer approximately.
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申请公布号 |
JP2000155085(A) |
申请公布日期 |
2000.06.06 |
申请号 |
JP19980347859 |
申请日期 |
1998.11.20 |
申请人 |
AGENCY OF IND SCIENCE & TECHNOL;MIZUTANI WATARU;SHARP CORP |
发明人 |
MIZUTANI WATARU;INOUE ATSUHISA |
分类号 |
H01J37/20;B82B3/00;G01B21/30;G01N37/00;G01Q30/20;G01Q60/24;G01Q60/38;(IPC1-7):G01N13/16 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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