Verfahren zur Herstellung von einem Isolationsgraben in einem Substrat für Smart-Power-Technologien,申请号DE19945009300-传众专利搜索

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发明名称	Verfahren zur Herstellung von einem Isolationsgraben in einem Substrat für Smart-Power-Technologien
摘要
申请公布号	DE59409300(D1)	申请公布日期	2000.05.31
申请号	DE19945009300	申请日期	1994.06.08
申请人	SIEMENS AG	发明人	SCHWALKE, DR.
分类号	H01L21/225;H01L21/76;(IPC1-7):H01L21/76	主分类号	H01L21/225
代理机构		代理人
主权项
地址

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