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发明名称
Verfahren zum Herstellen einer Halbleiteranordnung mit Schaltkreis-Blockeinheiten
摘要
申请公布号
DE69229887(T2)
申请公布日期
2000.05.31
申请号
DE19926029887T
申请日期
1992.03.16
申请人
FUJITSU LTD., KAWASAKI
发明人
EMA, TAIJI
分类号
H01L21/82;H01L21/3205;H01L21/70;H01L27/02;H05K3/00;(IPC1-7):H01L21/70
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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