| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface fault checking device which can automatically extract with high accuracy only the surfaces faults including the minute unevenness, projections, etc., and will not detect erroneously such foreign matters as dust attached on the surface as faults. SOLUTION: A photodetecting image, that is formed by an image pickup means 2a, is processed by an image processing means 20 and is then detected by a fault candidate detection means 21 of the means 20. A detection position collation means 29 collates the detection position data on a surface fault, including the wrong detection data on a foreign matter that is calculated by a 1st detection position calculation means 27 with the detection position data on a foreign matter that is detected by as foreign matter detection means 22 of the means 20 and calculated by a 2nd detection position calculation means 28. Then a foreign matter existing at the same position as an isolated point, that is detected by the means 22 from among those isolated points detected by the means 21, is decided as a wrongly detected fault, is excluded from the fault information, and is displayed by a display means 11. |
