发明名称 DIVIDING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To efficiently and economically transfer individual pellets to a transport tray after a base, such as the CSP base is divided. SOLUTION: A dividing device 10 contains at least a chuck area 13 for holding a work, a cutting area 14 for cutting the work, a cleaning area 15 for cleaning the work, a transfer area 17 for picking up pellets divided in the cutting area 14 and transferring the picked-up pellets to a transport tray, and a carry-out area 18 for carrying out the transport tray.</p>
申请公布号 JP2000150427(A) 申请公布日期 2000.05.30
申请号 JP19980315975 申请日期 1998.11.06
申请人 DISCO ABRASIVE SYST LTD 发明人 YOSHII MASAHIRO;NAMIOKA SHINICHI
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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