| 摘要 |
PROBLEM TO BE SOLVED: To reduce a space for mounting light sources and to shorten the inspection time by arranging continuous light illumination for perpendicularly illuminating a work and strobe light illumination for illuminating at a certain angle within a single lighting apparatus. SOLUTION: Continuous lighting 6 is provided on the right and the left at an upper horizontal position, and two-stage strobe lighting 7 is provided on lower sloped portions. An inspection procedure is as follows: A first BGA substrate 9 is stopped within an image incorporating range 10 of a CCD camera 5, and the image of an alignment mark 11 is read by the continuous lighting 6. Successively, the image of a solder ball 12 is read by the lighting 7, and at the same time, a BGA frame 8 and the camera 5 start moving reactive to each other. Upon recognition of the last ball 12 on the substrate 9, the relative movement stops, and the image of a mark 11 is read by the continuous lighting 6. Whether the mount position of each ball 12 is satisfactory or not is determined by calculating an inclination of the entire frame 8 on the basis of the first and the last marks 11 on the substrate 9. |
