Ink jet head substrate, a method for manufacturing the substrate, an ink jet recording head having the substrate, and a method for manufacturing the head

摘要

A substrate is formed for use of an ink jet recording head provided with a plurality in heat generating members for generating thermal energy to be utilized for discharging ink, an interlayer film arranged for the lower layer of each of said heat generating members, and a protection layer for protecting said heat generating member. Each of the heat generating members of the substrate is structured by metal and insulator, and at the same time, the rate of metal content in the vicinity of the interfaces of the heat generating member becomes smaller than that in the center of the heat generating member in the film thickness direction thereof. With the structure of such member thus arranged, it is made possible to prevent or suppress interlayer peelings and cracks from taking place in each of the heat generating resistive layers where temperature changes are made intensely due to thermal cycle.