| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the rotation of a substrate and to enable cleaning to be performed in a high speed rotation by providing three or more driving rollers supporting and rotating a disk substrate when cleaning is performed supporting and rotating a disk substrate. SOLUTION: The outer periphery part of a disk substrate 1 is supported by movable driving rollers 2, 3, and a fixed driving roller 4 between them, and supported in the vertical state. Rotary power is given to the disk substrate 1 by these three driving rollers and the disk 1 is rotated, and cleaning is performed with a scrubbing roll and the like. These three driving rollers 2, 3, 4 are rotated at constant speed through one driving shaft from a drive source and three belts 8, 9, 10 or a gear. The disk 1 is rotated by three rollers at the time of cleaning, at the time of loading a disk and unloading a disk after finish of cleaning, two movable driving rollers 2, 3 at the upper part are moved to the upper side by moving roller moving members 6, 7 to the upper side, and supporting the disk substrate 1 is released without moving the roller 4.
|
