| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element sealing method which can obtain sufficient sealing quality corresponding to the size reduction of a product. SOLUTION: A base 22 which contains a piezoelectric element and a lid body 23 for hermetically closing the base are fixed by using a sealing material. In this case, the lid body 23 and the base 22 are positioned by using a sealing jig, the sealing material interposed between the lid body and base is fused by 1st heating for temporary fixation, and while a state where the lid body and base are positioned is maintained by the temporary fixation, 2nd heating is carried out to fix the lid body 23 and base 22 normally.
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