| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device reducing load of a host computer for smoothly performing processing. SOLUTION: A focusing ion beam device 101 is connected to a LAN 109 in a plant through a LAN. A host computer 102, an optical system control unit 103 controlling a focus and a magnification of an ion beam by an electric field, an optical axis control unit 104 positioning an ion source, a vacuum exhaust unit 105 evacuating a sample chamber into a vacuum atmosphere, a sample stage 106 carrying a sample and moving to a beam irradiation position, and a sample conveying device 107 conveying the sample to the sample stage 106 are connected to a bus line 108 so as to be controlled in noncentralized operation.
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