| 摘要 |
<p>PROBLEM TO BE SOLVED: To oscillate a high output ultraviolet laser beam having an optional single spectrum. SOLUTION: A basic wave laser beam 4 is oscillated by using a seed light source for generating seed light 2 and ultraviolet light 14 having a required wavelength is outputted by sum frequency mixing by using the basic wave laser beam 4 as a reference wave. The laser beam 4 is used as a laser material for sum frequency mixing. The obtained ultraviolet light 14 has single spectrum light just fit to the wavelengths of ArF and KrF excimer laser beams. For attaining a high output, a slave laser beam can be oscillated by the seed light. A non-linear optical crystal is used for sum frequency mixing, so that a time delay is not generated.</p> |
