发明名称 FLOWMETER AND FLUID SUPPLYING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a flowmeter for exactly measuring flow rate in a range wider than that in a conventional manner. SOLUTION: This device is provided with a first magnet 63 fixed to a wall part forming a hollow part 61c of a casing 61 and a second magnet 64 fixed to the position opposed to the first magnet 63 in a rotary body 62 so that their same polarities are opposed to each other. In this case, the rotary body 62 is positioned in a non-contact state in the hollow part 61c of the casing 61. Therefore, when the rotary body 62 is rotated in contact with fluid, abrasion resistance can be hardly generated in the rotary body 62. Thus, the flow rate of the fluid can be exactly detected in a wide range regardless of the level of the flow rate.
申请公布号 JP2000146639(A) 申请公布日期 2000.05.26
申请号 JP19980336475 申请日期 1998.11.12
申请人 TOKYO ELECTRON LTD 发明人 TATEYAMA KIYOHISA
分类号 G01F1/115;B05C11/10;G03F7/16;H01L21/027;(IPC1-7):G01F1/115 主分类号 G01F1/115
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