PRODUCTION OF ELECTRODE WIRING CONDUCTION HOLE AND PRODUCTION OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a process for producing electrode wiring conduction holes capable of forming the small electrode wiring conduction holes in a semiconductor element and a process for producing a semiconductor device. SOLUTION: The hole patterns for the electrode wiring conduction holes are transferred to a thin film of the photosensitive material on a wafer by projecting the first light transmitted through translucent regions consisting of a translucent film 4 and the second light which is transmitted through the apertures consisting of the translucent parts 3 disposed in the translucent regions and is the antiphase from the phase of the first light through a lens.