CVD-Reaktor und dessen Verwendung,申请号DE19991080266-传众专利搜索

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发明名称	CVD-Reaktor und dessen Verwendung
摘要
申请公布号	DE19980266(D2)	申请公布日期	2000.05.25
申请号	DE19991080266	申请日期	1999.02.18
申请人	AIXTRON AG	发明人	JUERGENSEN, HOLGER;DESCHLER, MARC;STRAUCH, GERD;SCHUMACHER, MARKUS;KAEPPELER, JOHANNES
分类号	C23C16/44;C23C16/455;H01L21/31;(IPC1-7):C23C16/44	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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