| 摘要 |
PROBLEM TO BE SOLVED: To shorten a measuring time and to lighten the burden on a worker when there are a plurality of parts to be measured in a substance to be measured, or when a plurality of substances to be measured are measured, in an ultra-high-precision three-dimensional measuring apparatus which resets a coordinate system when a part to be measured is center-positioned, and performs measurement. SOLUTION: In this method, a probe 6 for detecting the surface shape of a substance to be measured 2 is used, and the surface shape of the substance to be measured 2 is measured by scanning the probe 6 or substance to be measured 2 in X Y directions. On this occasion, a plurality of specific positions are stored as affset coordinates, along with measuring the surface shape of a part to be measured by a coordinate system which makes a specific position of the substance to be measured 2 a reference, and movement of the probe 6 and correlation measurement among parts to be measured are performed on the basis of the offset coordinate values.
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