| 摘要 |
PURPOSE: A method for repairing the disconnection of wiring and a multilayer wiring structure are provided to improve the reliability for the restoration of wiring defect, in the event that disconnection is caused in wiring. CONSTITUTION: In a method for repairing the disconnection of wiring, main wiring(13) having disconnection is jointed to spare wiring(16), formed by filling interlaid insulation film(15) to the dis connected wiring(13), in a portion intersected each other. By projecting a laser beam of a first output strength from a laser toward the intersected portion of the main wiring(13) and the spare wiring(16), an aperture is generated. Then, the main wiring is completely jointed to the spare wiring, by projecting a laser beam of a second output strength toward the aperture and melting parts of the main wiring(13) and the spare wiring(16). |
