ACTUATOR OF INK-JET PRINT HEAD AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An actuator is provided to form a chamber in a more regular size and interval by integrally forming a protecting thin film which is an etching stop layer between a vibration plate and a chamber plate made into a metal thin plate. CONSTITUTION: An actuator forms a chamber(31) which inlets and outlets ink by the operation of a vibration plate, in a wanted size and shape with etching, after depositing a protecting thin film(20) between a vibration plate(10) and a chamber plate(30) which are made into metal. A piezoelectric material(40) interlocks the vibration plate while changed by electric conduction in a length direction as vertically attached on the same line as the chamber in the same number. An electrode(50) conducts power input from the outside as laminated on the upper part of the piezoelectric material. The piezoelectric material and the electrode are deposited on the upper part of the vibration plate.