| 摘要 |
PURPOSE: A corrosion resisting member having high corrosion resistance to chloric gas at more than 600°C and a heater for preventing the surface of the corrosion-resisting member from being deteriorated or peeled off and not generating contamination are provided. CONSTITUTION: A corrosion-resisting member(1) exposed to a chloric gas atmosphere at more than 600°C is composed of a sintering body(6) consisted of nitride aluminum and a silundum film(5) formed by a chemical gaseous growth method, coated on the surface of the sintering body. Desirably, the corrosion-resisting member is a heater for heating the heated material at more than 600°C, and a resistance heating body(4) is laid in a board(2). Thereby, when a cycle between the exposition to a chloric gas furnace at 600°C and the temperature effect to a lower temperature is repeated, the heater prevents the surface of the corrosion-resisting member from being deteriorated and peeled off.
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