发明名称 VERY NARROW BAND LASER WITH UNSTABLE RESONANCE CAVITY
摘要 A very narrow band laser. The very narrow bandwidth is achieved by creating an unstable resonance cavity using a cylindrical, partially reflecting mirror (68) to provide an output coupler in combination with a line narrowing module (18) having a beam expander and a curved grating.
申请公布号 EP0992092(A4) 申请公布日期 2000.05.24
申请号 EP19980926365 申请日期 1998.06.05
申请人 CYMER, INC. 发明人 ERSHOV, ALEXANDER I.
分类号 G02B5/18;G03F7/20;H01S3/08;H01S3/1055;H01S3/13;H01S3/137;H01S3/225 主分类号 G02B5/18
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