SOLUTION FOR FORMING THIN OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To improve the preservation stability and to prevent the formation of a precipitate even when a soln. is preserved for a long period by incorporating the respective carboxylates of La, Sr and Co into an org. solvent in a specified molar ratio and further specifying the concns. of the respective metals and the water content of the soln. SOLUTION: Respective carboxylates of La, Sr and Co are incorporated into an org. solvent in a molar ratio corresponding to LaxSr1-xCoO3 (where 0.1<=x<=0.6). The content of La is controlled to <=8 wt.%, that of Sr to <=10 wt.% and that of Co to <=10 wt.%, and the water content is controlled to <=1 wt.% to prepare a soln. for forming the thin film of an LaSrCo multiple oxide. The soln. is applied on a substrate and heated to form a thin oxide film. The thin oxide film is heat-treated and crystallized to form the thin film of the LaSrCo multiple oxide having a perovskite structure. A hydrocarbonic solvent immiscible with water is preferably used as the org. solvent.